Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.1597889
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dc.titleFocusing of MeV ion beams by means of tapered glass capillary optics
dc.contributor.authorNebiki, T.
dc.contributor.authorYamamoto, T.
dc.contributor.authorNarusawa, T.
dc.contributor.authorBreese, M.B.H.
dc.contributor.authorTeo, E.J.
dc.contributor.authorWatt, F.
dc.date.accessioned2014-10-16T09:50:38Z
dc.date.available2014-10-16T09:50:38Z
dc.date.issued2003-09
dc.identifier.citationNebiki, T., Yamamoto, T., Narusawa, T., Breese, M.B.H., Teo, E.J., Watt, F. (2003-09). Focusing of MeV ion beams by means of tapered glass capillary optics. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 21 (5) : 1671-1674. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1597889
dc.identifier.issn07342101
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/98721
dc.description.abstractThe focusing of MeV ion beams by means of tapered glass capillary optics was discussed. It is found that majority of incident ions were lost by the dechanneling or large-angle scattering process and about 1% more or less was emitted through the outlet without significant energy loss. The analysis showed that when the ion species were extended to heavier elements, the method provided versatile maskless ion implantation techniques.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1116/1.1597889
dc.sourceScopus
dc.typeConference Paper
dc.contributor.departmentPHYSICS
dc.description.doi10.1116/1.1597889
dc.description.sourcetitleJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
dc.description.volume21
dc.description.issue5
dc.description.page1671-1674
dc.description.codenJVTAD
dc.identifier.isiut000185608100020
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