White light interferometry for surface profiling with a colour CCD

Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.optlaseng.2012.02.002

Title:	White light interferometry for surface profiling with a colour CCD
Authors:	Kumar, U.P. Haifeng, W. Mohan, N.K. Kothiyal, M.P.
Keywords:	Fringe analysis Phase shifting Single-chip colour CCD camera Surface profiling White light interferometry
Issue Date:	Aug-2012
Citation:	Kumar, U.P., Haifeng, W., Mohan, N.K., Kothiyal, M.P. (2012-08). White light interferometry for surface profiling with a colour CCD. Optics and Lasers in Engineering 50 (8) : 1084-1088. ScholarBank@NUS Repository. https://doi.org/10.1016/j.optlaseng.2012.02.002
Abstract:	In laser based interferometry, the unambiguous measurement range is limited to half a wavelength. Multiple wavelength or white light interferometer is used to overcome this difficulty. In this paper a white light interferometer with a colour CCD camera is discussed. We access interference intensity information from the three channels of the colour CCD simulating three-wavelength measurement. This makes the data acquisition as simple as in single wavelength interferometry. The unambiguous measurement range however gets limited by the coherence length of the CCD. The usefulness of the proposed method is demonstrated on a micro-sample. © 2012 Elsevier Ltd. All rights reserved.
Source Title:	Optics and Lasers in Engineering
URI:	http://scholarbank.nus.edu.sg/handle/10635/98582
ISSN:	01438166
DOI:	10.1016/j.optlaseng.2012.02.002
Appears in Collections:	Staff Publications

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