Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1390314
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dc.titleSynthesis of large area aligned carbon nanotube arrays from C2H2-H2 mixture by rf plasma-enhanced chemical vapor deposition
dc.contributor.authorWang, Y.H.
dc.contributor.authorLin, J.
dc.contributor.authorHuan, C.H.A.
dc.contributor.authorChen, G.S.
dc.date.accessioned2014-10-16T09:44:08Z
dc.date.available2014-10-16T09:44:08Z
dc.date.issued2001-07-30
dc.identifier.citationWang, Y.H., Lin, J., Huan, C.H.A., Chen, G.S. (2001-07-30). Synthesis of large area aligned carbon nanotube arrays from C2H2-H2 mixture by rf plasma-enhanced chemical vapor deposition. Applied Physics Letters 79 (5) : 680-682. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1390314
dc.identifier.issn00036951
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/98195
dc.description.abstractLarge area aligned carbon nanotube (CNT) arrays have been successfully synthesized from C2H2 and H2 mixture by rf plasma-enhanced chemical vapor deposition (without hot filament) on iron-coated silicon substrates. H2 plasma (not H2 gas) was confirmed to play the role of reducing iron oxide to metallic iron and promoting the formation of evenly separated particles, as well as being the primary factor in synthesizing aligned CNTs. The addition of H2 gas with no plasma during the growth resulted in randomly oriented CNTs. Meanwhile, without the addition of H2, the C2H2 plasma resulted in the growth of very fine worm-like carbon fibers. Using substrates with a thicker catalyst layer (>90 nm) reduced the CNT density significantly. © 2001 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.1390314
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.doi10.1063/1.1390314
dc.description.sourcetitleApplied Physics Letters
dc.description.volume79
dc.description.issue5
dc.description.page680-682
dc.description.codenAPPLA
dc.identifier.isiut000170015900042
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