Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0168-583X(99)00862-9
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dc.titleSub 100 nm proton beam micromachining: theoretical calculations on resolution limits
dc.contributor.authorVan Kan, J.A.
dc.contributor.authorSum, T.C.
dc.contributor.authorOsipowicz, T.
dc.contributor.authorWatt, F.
dc.date.accessioned2014-10-16T09:43:02Z
dc.date.available2014-10-16T09:43:02Z
dc.date.issued2000-03
dc.identifier.citationVan Kan, J.A., Sum, T.C., Osipowicz, T., Watt, F. (2000-03). Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 161 : 366-370. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(99)00862-9
dc.identifier.issn0168583X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/98100
dc.description.abstractProton beam micromachining is a novel direct-write process for the production of three-dimensional (3D) micro-structures. A focused beam of MeV protons is scanned in a pre-determined pattern over a suitable resist material (e.g. PMMA or SU-8) and the latent image formed is subsequently developed chemically. In this paper calculations on theoretical resolution limits of proton beam micromachined three-dimensional microstructures are presented. Neglecting the finite beam size, a Monte Carlo ion transport code was used in combination with a theoretical model describing the delta-ray (δ-ray) energy deposition to determine the lateral energy deposition distribution in PMMA resist material. The energy deposition distribution of ion induced secondary electrons (δ-rays) has been parameterized using analytical models. It is assumed that the attainable resolution is limited by a convolution of the spread of the ion beam and energy deposition of the δ-rays.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/S0168-583X(99)00862-9
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.doi10.1016/S0168-583X(99)00862-9
dc.description.sourcetitleNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
dc.description.volume161
dc.description.page366-370
dc.description.codenNIMBE
dc.identifier.isiut000086204100066
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