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Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1606502
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dc.titleProton beam writing of low-loss polymer optical waveguides
dc.contributor.authorSum, T.C.
dc.contributor.authorBettiol, A.A.
dc.contributor.authorVan Kan, J.A.
dc.contributor.authorWatt, F.
dc.contributor.authorPun, E.Y.B.
dc.contributor.authorTung, K.K.
dc.date.accessioned2014-10-16T09:37:36Z
dc.date.available2014-10-16T09:37:36Z
dc.date.issued2003-09-01
dc.identifier.citationSum, T.C., Bettiol, A.A., Van Kan, J.A., Watt, F., Pun, E.Y.B., Tung, K.K. (2003-09-01). Proton beam writing of low-loss polymer optical waveguides. Applied Physics Letters 83 (9) : 1707-1709. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1606502
dc.identifier.issn00036951
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/97638
dc.description.abstractA study was performed on proton beam writing of low-loss polymer optical waveguides. Low-loss channel waveguides in SU-8, a chemically amplified negative tone resist were fabricated. The results showed that waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.1606502
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.doi10.1063/1.1606502
dc.description.sourcetitleApplied Physics Letters
dc.description.volume83
dc.description.issue9
dc.description.page1707-1709
dc.description.codenAPPLA
dc.identifier.isiut000184992000007
Appears in Collections:Staff Publications

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