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Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2010.01.015
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dc.titleMicromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon
dc.contributor.authorOw, Y.S.
dc.contributor.authorBreese, M.B.H.
dc.contributor.authorLeng, Y.R.
dc.contributor.authorAzimi, S.
dc.contributor.authorTeo, E.J.
dc.contributor.authorSun, X.W.
dc.date.accessioned2014-10-16T09:32:23Z
dc.date.available2014-10-16T09:32:23Z
dc.date.issued2010-05-01
dc.identifier.citationOw, Y.S., Breese, M.B.H., Leng, Y.R., Azimi, S., Teo, E.J., Sun, X.W. (2010-05-01). Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 268 (9) : 1416-1421. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2010.01.015
dc.identifier.issn0168583X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/97194
dc.description.abstractSilicon has been machined on lateral resolutions of micrometers and on depth resolutions of nanometers using a recently-developed process based on ion irradiation and electrochemical anodisation. Here we investigate its use as a recording medium for computer generated hologram patterns. We describe the fabrication of both amplitude and phase binary modulated reflective computer generated hologram patterns on a silicon surface with pixel sizes of 5 μm. We further discuss the use of micromachined silicon to variably modulate both amplitude and phase in a continuous, rather than a binary fashion. © 2010 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.nimb.2010.01.015
dc.sourceScopus
dc.subjectComputer generated holograms
dc.subjectHolography
dc.subjectIon beam irradiation
dc.subjectMicromachining
dc.subjectSilicon
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.doi10.1016/j.nimb.2010.01.015
dc.description.sourcetitleNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
dc.description.volume268
dc.description.issue9
dc.description.page1416-1421
dc.description.codenNIMBE
dc.identifier.isiut000277679300009
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