Please use this identifier to cite or link to this item:
https://doi.org/10.1088/0957-0233/9/11/018
DC Field | Value | |
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dc.title | Designs of multi-target carousels for pulsed-laser deposition systems | |
dc.contributor.author | Xu, S.Y. | |
dc.contributor.author | Tan, C.W. | |
dc.contributor.author | Ong, C.K. | |
dc.date.accessioned | 2014-10-16T09:20:28Z | |
dc.date.available | 2014-10-16T09:20:28Z | |
dc.date.issued | 1998-11 | |
dc.identifier.citation | Xu, S.Y., Tan, C.W., Ong, C.K. (1998-11). Designs of multi-target carousels for pulsed-laser deposition systems. Measurement Science and Technology 9 (11) : 1912-1915. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/9/11/018 | |
dc.identifier.issn | 09570233 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/96180 | |
dc.description.abstract | For different applications of the pulsed-laser deposition (PLD) technique and for particular PLD chambers, different multi-target carousels are required. Here we describe three designs of a multi-target carousel for PLD which present separately the advantages of sufficient target cooling, reduced probability of jamming in operation and an adjustable target-to-flange distance. These carousels can be applied in various simple and small PLD systems where commercial products are not suitable, as well as in laser-molecular-beam-epitaxy (L-MBE) systems. They are of simple structure, low cost and may be constructed in a normal workshop. | |
dc.source | Scopus | |
dc.subject | Laser-molecular-beam-epitaxy | |
dc.subject | Multi-layered thin films | |
dc.subject | Multi-target carousel | |
dc.subject | Pulsed-laser deposition | |
dc.type | Article | |
dc.contributor.department | PHYSICS | |
dc.description.doi | 10.1088/0957-0233/9/11/018 | |
dc.description.sourcetitle | Measurement Science and Technology | |
dc.description.volume | 9 | |
dc.description.issue | 11 | |
dc.description.page | 1912-1915 | |
dc.description.coden | MSTCE | |
dc.identifier.isiut | 000076975300018 | |
Appears in Collections: | Staff Publications |
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