Please use this identifier to cite or link to this item: https://doi.org/10.1088/0957-0233/9/11/018
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dc.titleDesigns of multi-target carousels for pulsed-laser deposition systems
dc.contributor.authorXu, S.Y.
dc.contributor.authorTan, C.W.
dc.contributor.authorOng, C.K.
dc.date.accessioned2014-10-16T09:20:28Z
dc.date.available2014-10-16T09:20:28Z
dc.date.issued1998-11
dc.identifier.citationXu, S.Y., Tan, C.W., Ong, C.K. (1998-11). Designs of multi-target carousels for pulsed-laser deposition systems. Measurement Science and Technology 9 (11) : 1912-1915. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/9/11/018
dc.identifier.issn09570233
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/96180
dc.description.abstractFor different applications of the pulsed-laser deposition (PLD) technique and for particular PLD chambers, different multi-target carousels are required. Here we describe three designs of a multi-target carousel for PLD which present separately the advantages of sufficient target cooling, reduced probability of jamming in operation and an adjustable target-to-flange distance. These carousels can be applied in various simple and small PLD systems where commercial products are not suitable, as well as in laser-molecular-beam-epitaxy (L-MBE) systems. They are of simple structure, low cost and may be constructed in a normal workshop.
dc.sourceScopus
dc.subjectLaser-molecular-beam-epitaxy
dc.subjectMulti-layered thin films
dc.subjectMulti-target carousel
dc.subjectPulsed-laser deposition
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.doi10.1088/0957-0233/9/11/018
dc.description.sourcetitleMeasurement Science and Technology
dc.description.volume9
dc.description.issue11
dc.description.page1912-1915
dc.description.codenMSTCE
dc.identifier.isiut000076975300018
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