Please use this identifier to cite or link to this item: https://doi.org/10.1007/s12274-013-0296-8
DC FieldValue
dc.titleAn innovative way of etching MoS2: Characterization and mechanistic investigation
dc.contributor.authorHuang, Y.
dc.contributor.authorWu, J.
dc.contributor.authorXu, X.
dc.contributor.authorHo, Y.
dc.contributor.authorNi, G.
dc.contributor.authorZou, Q.
dc.contributor.authorKoon, G.K.W.
dc.contributor.authorZhao, W.
dc.contributor.authorCastro Neto, A.H.
dc.contributor.authorEda, G.
dc.contributor.authorShen, C.
dc.contributor.authorÖzyilmaz, B.
dc.date.accessioned2014-10-16T09:15:32Z
dc.date.available2014-10-16T09:15:32Z
dc.date.issued2013
dc.identifier.citationHuang, Y., Wu, J., Xu, X., Ho, Y., Ni, G., Zou, Q., Koon, G.K.W., Zhao, W., Castro Neto, A.H., Eda, G., Shen, C., Özyilmaz, B. (2013). An innovative way of etching MoS2: Characterization and mechanistic investigation. Nano Research 6 (3) : 200-207. ScholarBank@NUS Repository. https://doi.org/10.1007/s12274-013-0296-8
dc.identifier.issn19980124
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/95763
dc.description.abstractWe report a systematic study of the etching of MoS2 crystals by using XeF2 as a gaseous reactant. By controlling the etching process, monolayer MoS2 with uniform morphology can be obtained. The Raman and photoluminescence spectra of the resulting material were similar to those of exfoliated MoS2. Utilizing this strategy, different patterns such as a Hall bar structure and a hexagonal array can be realized. Furthermore, the etching mechanism was studied by introducing graphene as an etching mask. We believe our technique opens an easy and controllable way of etching MoS2, which can be used to fabricate complex nanostructures, such as nanoribbons, quantum dots, and transistor structures. This etching process using XeF2 can also be extended to other interesting two-dimensional crystals. Graphical abstract: [Figure not available: see fulltext.] © 2013 Tsinghua University Press and Springer-Verlag Berlin Heidelberg.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1007/s12274-013-0296-8
dc.sourceScopus
dc.subjectetching
dc.subjectgraphene
dc.subjecthexagonal
dc.subjectMoS2
dc.subjectphotoluminescence
dc.subjectXeF2
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.doi10.1007/s12274-013-0296-8
dc.description.sourcetitleNano Research
dc.description.volume6
dc.description.issue3
dc.description.page200-207
dc.identifier.isiut000316087300006
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

111
checked on Aug 12, 2020

WEB OF SCIENCETM
Citations

110
checked on Aug 12, 2020

Page view(s)

138
checked on Aug 1, 2020

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.