Mechanical properties of gradient pulse biased amorphous carbon film

Abstract

A new method to prepare compositional amorphous carbon (a-C) film termed gradient pulse bias is presented. The a-C film prepared this way showed outstanding mechanical and excellent tribological properties. The hardness and reduced modulus of the film are calculated to be 66 GPa and 320 GPa respectively. A wear rate of 1.3 × 10- 8 mm3/N m and frictional coefficient of 0.1 was also recorded. The novel film is also compared with multilayered and single layer a-C film prepared using the same system. © 2007 Elsevier B.V. All rights reserved.