Power MEMS: An important category of MEMS

Abstract

As an important category of MEMS, power MEMS are defined as microsystems for power generation and energy conversion including propulsion and cooling. Power MEMS can be classified into micro thermodynamic machines including microturbines, miniature internal combustion engines and micro-coolers; solid-state direct energy conversion including thermoelectric and photovoltaic microstructures; micro electrochemical devices including micro fuel cells and nanostructure batteries; vibration energy harvesting devices including piezoelectric, magnetic or electrostatic micro generators, and micro thrusters for propulsion. This chapter will introduce extensively the micro thermophotovoltaic power generators, micro direct methanol fuel cells, solid propellant micro propulsion systems, and micro scale combustion. Then a brief introduction of other power MEMS systems will be given. Finally, some guidelines for future investigations are provided. © 2010 Nova Science Publishers, Inc. All rights reserved.