Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.886251
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dc.titleAll-solid-state thin film microbatteries fabricated by rf sputtering
dc.contributor.authorFeng, J.K.
dc.contributor.authorLai, M.O.
dc.contributor.authorZeng, X.
dc.contributor.authorHuang, Z.
dc.contributor.authorLu, L.
dc.date.accessioned2014-10-07T09:13:13Z
dc.date.available2014-10-07T09:13:13Z
dc.date.issued2011
dc.identifier.citationFeng, J.K., Lai, M.O., Zeng, X., Huang, Z., Lu, L. (2011). All-solid-state thin film microbatteries fabricated by rf sputtering. Proceedings of SPIE - The International Society for Optical Engineering 8035 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.886251
dc.identifier.isbn9780819486097
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/85873
dc.description.abstractNovel high power density cathode and anode materials for thin film battery are reported here. The layered Li(NiMnCo)1/3O2 film fabricated by sputtering shows a capacity as high as 190 mAhg-1 in the range of 3-4.9 V and a capacity retention of 90% after 100 cycles. Novel oxide anode is synthesized by sputtering at room temperature, delivering a special capacity as high as 700 mAhg-1 and a good capacity retention. The thin film battery using these materials shows a good cyclability and high rate ability. © 2011 SPIE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.886251
dc.sourceScopus
dc.subjectAnode
dc.subjectCathode
dc.subjectLithium battery
dc.subjectOxide
dc.subjectSputtering
dc.subjectThin film battery
dc.typeConference Paper
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1117/12.886251
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume8035
dc.description.page-
dc.description.codenPSISD
dc.identifier.isiut000294155700009
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