All-solid-state thin film microbatteries fabricated by rf sputtering

Abstract

Novel high power density cathode and anode materials for thin film battery are reported here. The layered Li(NiMnCo)1/3O2 film fabricated by sputtering shows a capacity as high as 190 mAhg-1 in the range of 3-4.9 V and a capacity retention of 90% after 100 cycles. Novel oxide anode is synthesized by sputtering at room temperature, delivering a special capacity as high as 700 mAhg-1 and a good capacity retention. The thin film battery using these materials shows a good cyclability and high rate ability. © 2011 SPIE.