Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.msea.2009.04.030
DC FieldValue
dc.titleWedge indentation studies of low-k films at inert, water and ambient environments
dc.contributor.authorYeap, K.B.
dc.contributor.authorZeng, K.
dc.contributor.authorChi, D.
dc.date.accessioned2014-10-07T09:12:48Z
dc.date.available2014-10-07T09:12:48Z
dc.date.issued2009-08-25
dc.identifier.citationYeap, K.B., Zeng, K., Chi, D. (2009-08-25). Wedge indentation studies of low-k films at inert, water and ambient environments. Materials Science and Engineering A 518 (1-2) : 132-138. ScholarBank@NUS Repository. https://doi.org/10.1016/j.msea.2009.04.030
dc.identifier.issn09215093
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/85838
dc.description.abstractWedge indentation experiments are performed to study the time-dependent fracture behavior of silica-based low-k films, namely BlackDiamond® (BD) film and methysilsesquoxane (MSQ) film, both on Si substrate. Two wedge indentation tests, load-holding and varying-loading-rates tests, are performed in this study. It is found that the chemical structure of the low-k films greatly influences the crack growth during the load-holding and varying-loading-rates tests. For the MSQ/Si system, continuously increasing indentation load to above the critical load (>2 mN) is required for crack growth; while for the BD/Si system, spending excessive period of time at below the critical load (
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.msea.2009.04.030
dc.sourceScopus
dc.subjectLow-k films
dc.subjectTime-dependent deformation
dc.subjectWedge indentation
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1016/j.msea.2009.04.030
dc.description.sourcetitleMaterials Science and Engineering A
dc.description.volume518
dc.description.issue1-2
dc.description.page132-138
dc.identifier.isiut000268532300020
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

1
checked on Sep 12, 2019

Page view(s)

44
checked on Sep 7, 2019

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.