Please use this identifier to cite or link to this item: https://doi.org/10.1109/JMEMS.2010.2067440
Title: Double-layered vibratory grating scanners for high-speed high-resolution laser scanning
Authors: Du, Y. 
Zhou, G. 
Cheo, K.L. 
Zhang, Q.
Feng, H.
Chau, F.S. 
Keywords: Diffraction grating
microoptoelectromechanical systems (MOEMS)
microresonators
microscanners
Issue Date: Oct-2010
Citation: Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S. (2010-10). Double-layered vibratory grating scanners for high-speed high-resolution laser scanning. Journal of Microelectromechanical Systems 19 (5) : 1186-1196. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2010.2067440
Abstract: A novel micromachined electrostatic double-layered vibratory grating scanner has been successfully developed for high-speed high-resolution laser scanning applications. This paper presents its design, modeling, fabrication, and measurement results. A comprehensive dynamic model considering the geometric nonlinearity of the platform suspension flexures is also proposed to predict the dynamic performance of the device at large scanning amplitudes. Compared with previously reported single-layered vibratory grating scanners, double-layered scannersin which the diffraction grating and its driving actuator are located in different layershave the potential to scan at large amplitudes and at high scanning speeds with large aperture sizes. We have demonstrated a prototype with a 2-mm-diameter diffraction grating which is capable of scanning at 23.391 kHz with an optical scan angle of around 33 ° and a resulting θoptical D product (product of the optical scan angle and diameter of the diffraction grating) of 66 ° ̇mm. © 2006 IEEE.
Source Title: Journal of Microelectromechanical Systems
URI: http://scholarbank.nus.edu.sg/handle/10635/85022
ISSN: 10577157
DOI: 10.1109/JMEMS.2010.2067440
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