Please use this identifier to cite or link to this item: https://doi.org/10.1007/s11249-011-9835-1
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dc.titleA tribological study of SU-8 micro-dot patterns printed on Si surface in a flat-on-flat reciprocating sliding test
dc.contributor.authorBeng, N.
dc.contributor.authorMinn, T.M.
dc.contributor.authorSinha, S.K.
dc.date.accessioned2014-10-07T09:00:49Z
dc.date.available2014-10-07T09:00:49Z
dc.date.issued2011-11
dc.identifier.citationBeng, N., Minn, T.M., Sinha, S.K. (2011-11). A tribological study of SU-8 micro-dot patterns printed on Si surface in a flat-on-flat reciprocating sliding test. Tribology Letters 44 (2) : 167-176. ScholarBank@NUS Repository. https://doi.org/10.1007/s11249-011-9835-1
dc.identifier.issn10238883
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/84834
dc.description.abstractTribological properties of optimized SU-8 micro-dot patterns on Silicon (Si) were evaluated using a flat-on-flat tribometer. Sliding tests on the patterns were conducted against a SU-8 spin-coated 2×2 mm 2 Si substrate at varying normal loads at a fixed rotational speed. It was observed that the pitch of the SU-8 pattern on Si substrate had significant influence on the wear durability. Ultra-thin layer of perfluoropolyether was over-coated onto SU-8 micro-dot patterned specimens for enhanced wear durability, and the specimen of the optimized pitch 450 m has shown a wear life of more than 100,000 cycles at a normal load of 650 mN. © Springer Science+Business Media LLC 2011.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1007/s11249-011-9835-1
dc.sourceScopus
dc.subjectMicropatterning
dc.subjectSU-8
dc.subjectTribology
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1007/s11249-011-9835-1
dc.description.sourcetitleTribology Letters
dc.description.volume44
dc.description.issue2
dc.description.page167-176
dc.identifier.isiut000295172200006
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