Theoretical study of the output energy for various MEMS based electrostatic mechanisms

Please use this identifier to cite or link to this item: https://doi.org/10.1109/ICSET.2008.4747069

Title:	Theoretical study of the output energy for various MEMS based electrostatic mechanisms
Authors:	Lim, Y.M. Yang, B. Kotlanka, R.K. Heng, C.H. Xie, J. Tang, M. Han, J.H. Feng, H. Lee, C.
Issue Date:	2008
Citation:	Lim, Y.M.,Yang, B.,Kotlanka, R.K.,Heng, C.H.,Xie, J.,Tang, M.,Han, J.H.,Feng, H.,Lee, C. (2008). Theoretical study of the output energy for various MEMS based electrostatic mechanisms. 2008 IEEE International Conference on Sustainable Energy Technologies, ICSET 2008 : 552-557. ScholarBank@NUS Repository. https://doi.org/10.1109/ICSET.2008.4747069
Abstract:	This paper presents a comparison of the energy harvesting capabilities of 3 different electrostatic mechanisms based on MEMS (Microelectromechanical System) structures which are designed and operated in idea vacuum. The 3 mechanisms that will be compared are the inplane overlap, in-plane gap closing and out-of-plane gap closing mechanisms. Firstly, it was found that the in-plane gap closing mechanism potentially has the highest output energy amongst the 3 different mechanisms. Secondly, the best energy output for the in-plane gap closing mechanism is approximately 1.8 times that of the out-of-plane gap closing mechanism for load volumes between 5mm3 and 50mm 3. © 2008 IEEE.
Source Title:	2008 IEEE International Conference on Sustainable Energy Technologies, ICSET 2008
URI:	http://scholarbank.nus.edu.sg/handle/10635/84296
ISBN:	9781424418886
DOI:	10.1109/ICSET.2008.4747069
Appears in Collections:	Staff Publications

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