Please use this identifier to cite or link to this item:
https://doi.org/10.1109/VTSA.2009.5159330
DC Field | Value | |
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dc.title | Inversion-type surface channel In0.53Ga0.47As metal-oxide-semiconductor field-effect transistors with metal-gate/high-k dielectric stack and CMOS-compatible PdGe contacts | |
dc.contributor.author | Chin, H.-C. | |
dc.contributor.author | Liu, X. | |
dc.contributor.author | Tan, L.-S. | |
dc.contributor.author | Yeo, Y.-C. | |
dc.date.accessioned | 2014-10-07T04:46:00Z | |
dc.date.available | 2014-10-07T04:46:00Z | |
dc.date.issued | 2009 | |
dc.identifier.citation | Chin, H.-C.,Liu, X.,Tan, L.-S.,Yeo, Y.-C. (2009). Inversion-type surface channel In0.53Ga0.47As metal-oxide-semiconductor field-effect transistors with metal-gate/high-k dielectric stack and CMOS-compatible PdGe contacts. International Symposium on VLSI Technology, Systems, and Applications, Proceedings : 143-144. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/VTSA.2009.5159330" target="_blank">https://doi.org/10.1109/VTSA.2009.5159330</a> | |
dc.identifier.isbn | 9781424427857 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/83858 | |
dc.description.abstract | We report the first demonstration of a surface channel inversion-type In0.53Ga0.47As n-MOSFET featuring gold-free palladiumgermanium (PdGe) ohmic contacts and self-aligned S/D formed by silicon and phosphorus co-implantation. A gate stack comprising TaN/HfAlO/In 0.53Ga0.47As is also featured. Excellent transistor output characteristics with high drain current on/off ratio of 104, high peak electron mobility of 1420 cm2/Vs and peak transconductance of 142 mS/mm at gate length of 2 μm were demonstrated. In addition, the integration of low resistance PdGe ohmic contacts on In0.53Ga 0.47As alleviates contamination concerns associated with the common use of gold-based contacts on In0.53Ga0.47As. ©2009 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/VTSA.2009.5159330 | |
dc.source | Scopus | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/VTSA.2009.5159330 | |
dc.description.sourcetitle | International Symposium on VLSI Technology, Systems, and Applications, Proceedings | |
dc.description.page | 143-144 | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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