Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/83780
DC Field | Value | |
---|---|---|
dc.title | High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric | |
dc.contributor.author | Yu, X. | |
dc.contributor.author | Zhu, C. | |
dc.contributor.author | Wang, X.P. | |
dc.contributor.author | Li, M.F. | |
dc.contributor.author | Chin, A. | |
dc.contributor.author | Du, A.Y. | |
dc.contributor.author | Wang, W.D. | |
dc.contributor.author | Kwong, D.-L. | |
dc.date.accessioned | 2014-10-07T04:45:06Z | |
dc.date.available | 2014-10-07T04:45:06Z | |
dc.date.issued | 2004 | |
dc.identifier.citation | Yu, X.,Zhu, C.,Wang, X.P.,Li, M.F.,Chin, A.,Du, A.Y.,Wang, W.D.,Kwong, D.-L. (2004). High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric. Digest of Technical Papers - Symposium on VLSI Technology : 110-111. ScholarBank@NUS Repository. | |
dc.identifier.issn | 07431562 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/83780 | |
dc.description.abstract | In this work, we developed a novel Hf-based gate dielectric for MOSFETs with TaN metal gate. By incorporating Ta into HfO 2 films, significant improvements were achieved in contrast to pure HfO 2: (1) the dielectric crystallization temperature is increased up to 1000°C; (2) interface states density (D it) is reduced by one order of magnitude; (3) electron peak mobility is enhanced by more than two times; (4) charge trapping and threshold voltage shift is reduced by 20 times, greatly prolonging the device lifetime; (5) negligible sub-threshold swing and G m variations under constant voltage stress (CVS). | |
dc.source | Scopus | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.sourcetitle | Digest of Technical Papers - Symposium on VLSI Technology | |
dc.description.page | 110-111 | |
dc.description.coden | DTPTE | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
Show simple item record
Files in This Item:
There are no files associated with this item.
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.