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Please use this identifier to cite or link to this item: https://doi.org/10.1109/IMWS-BIO.2013.6756159
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dc.titleCharacterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications
dc.contributor.authorZhang, S.
dc.contributor.authorLou, L.
dc.contributor.authorWang, T.
dc.contributor.authorTsang, W.M.
dc.contributor.authorKwong, D.-L.
dc.contributor.authorLee, C.
dc.date.accessioned2014-10-07T04:42:26Z
dc.date.available2014-10-07T04:42:26Z
dc.date.issued2013
dc.identifier.citationZhang, S.,Lou, L.,Wang, T.,Tsang, W.M.,Kwong, D.-L.,Lee, C. (2013). Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications. 2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications, IMWS-BIO 2013 - Proceedings : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IMWS-BIO.2013.6756159" target="_blank">https://doi.org/10.1109/IMWS-BIO.2013.6756159</a>
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83546
dc.description.abstractVarious Nanoelectromechanical Systems (NEMS) sensors using piezoresistive silicon nanowires (SiNWs) as the sensing elements for pressure, strain and flow detection are reported. Measurement results reveal both excellent scalability and sensing stability for SiNWs based NEMS devices. Additionally, the new ultracompact pressure sensor with novel micro-grooved diaphragm structure is reported for low pressure range measurement, which leads to potential bio-medical applications. © 2013 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/IMWS-BIO.2013.6756159
dc.sourceScopus
dc.subjectblood flow
dc.subjectflow sensor
dc.subjectintraocular pressure (IOP)
dc.subjectpressure sensor
dc.subjectSilicon nanowires (SiNWs)
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/IMWS-BIO.2013.6756159
dc.description.sourcetitle2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications, IMWS-BIO 2013 - Proceedings
dc.description.page-
dc.identifier.isiutNOT_IN_WOS
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