Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2009.02.024
Title: Theoretical comparison of the energy harvesting capability among various electrostatic mechanisms from structure aspect
Authors: Lee, C. 
Lim, Y.M.
Yang, B.
Kotlanka, R.K.
Heng, C.-H. 
He, J.H.
Tang, M.
Xie, J.
Feng, H.
Keywords: Capacitive
Electrostatic
Energy harvester
Energy scavenger
Power MEMS
Vibration
Issue Date: Nov-2009
Citation: Lee, C., Lim, Y.M., Yang, B., Kotlanka, R.K., Heng, C.-H., He, J.H., Tang, M., Xie, J., Feng, H. (2009-11). Theoretical comparison of the energy harvesting capability among various electrostatic mechanisms from structure aspect. Sensors and Actuators, A: Physical 156 (1) : 208-216. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2009.02.024
Abstract: This paper provides (i) a comparison of the energy harvesting capabilities of three different electrostatic mechanisms, and (ii) discussion on the relations among the contributing parameters involved in maximizing the energy output that can be harvested from an electrostatic microelectromechanical system (MEMS) device. The three mechanisms considered in this paper are namely the in-plane overlap, in-plane gap closing and out-of-plane gap closing converters. In this analytical modeling, the mass of the movable loads as well as the cross-sectional areas of the devices' active regions were set to be the same for all the mechanisms, while we assumed these electrostatic mechanisms are operated in ideal vacuum environment. A maximum output energy density of 0.547 μJ mm-3 has been obtained for the case in which the movable load has a volume of 5 mm3. © 2009.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/83182
ISSN: 09244247
DOI: 10.1016/j.sna.2009.02.024
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