Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2007.04.046
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dc.titleIn-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy
dc.contributor.authorWong, C.-L.
dc.contributor.authorWong, W.-K.
dc.date.accessioned2014-10-07T04:30:38Z
dc.date.available2014-10-07T04:30:38Z
dc.date.issued2007-07-20
dc.identifier.citationWong, C.-L., Wong, W.-K. (2007-07-20). In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy. Sensors and Actuators, A: Physical 138 (1) : 167-178. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2007.04.046
dc.identifier.issn09244247
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/82544
dc.description.abstractWe present the in-plane characterization of micro-electromechanical systems (MEMS) resonators using a stroboscopic scanning electron microscope (SEM) imaging technique. The system features time-gated sampling of the secondary electron signal in order to achieve stroboscopy, hence dispensing with electron-optical compensation and noise effects associated with front-end electron beam blanking. We demonstrate its capability in phase-resolved motion freezing and displacement tracking as well as time-resolved velocity estimation of a MEMS electrostatic comb drive resonator. The stroboscopic imaging system is able to obtain a full profile of the resonator's displacement with an accuracy of 20 nm over one and several cycles of its motion, along with estimates of the resonator's instantaneous velocity at various phases of its motion down to about 0.012 m s-1. © 2007 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.sna.2007.04.046
dc.sourceScopus
dc.subjectDisplacement
dc.subjectMEMS resonators
dc.subjectScanning electron microscopy
dc.subjectStroboscopy
dc.subjectVelocity
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.sna.2007.04.046
dc.description.sourcetitleSensors and Actuators, A: Physical
dc.description.volume138
dc.description.issue1
dc.description.page167-178
dc.description.codenSAAPE
dc.identifier.isiut000248296900022
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