Please use this identifier to cite or link to this item:
https://doi.org/10.1109/LED.2003.812572
DC Field | Value | |
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dc.title | High-density MIM capacitors using AlTaOx dielectrics | |
dc.contributor.author | Yang, M.Y. | |
dc.contributor.author | Huang, C.H. | |
dc.contributor.author | Chin, A. | |
dc.contributor.author | Zhu, C. | |
dc.contributor.author | Li, M.F. | |
dc.contributor.author | Kwong, D.-L. | |
dc.date.accessioned | 2014-10-07T04:29:38Z | |
dc.date.available | 2014-10-07T04:29:38Z | |
dc.date.issued | 2003-05 | |
dc.identifier.citation | Yang, M.Y., Huang, C.H., Chin, A., Zhu, C., Li, M.F., Kwong, D.-L. (2003-05). High-density MIM capacitors using AlTaOx dielectrics. IEEE Electron Device Letters 24 (5) : 306-308. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2003.812572 | |
dc.identifier.issn | 07413106 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/82459 | |
dc.description.abstract | The authors have obtained good MIM capacitor integrity of high-capacitance density of 10 fF/μm2 using high-κ AlTaOx fabricated at 400°C. In addition, small voltage dependence of capacitance of < 600 ppm (quadratic voltage coefficient of only 130 ppm/V2) is obtained at 1 GHz using their mathematical derivation from measured high-frequency S parameters. These good results ensure the high-κ AlTaOx MIM capacitor technology is useful for high-precision circuits operated at the RF frequency regime. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/LED.2003.812572 | |
dc.source | Scopus | |
dc.subject | Capacitor | |
dc.subject | Dielectric constant | |
dc.subject | Frequency dependence | |
dc.subject | High κ | |
dc.subject | MIM | |
dc.subject | RF | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/LED.2003.812572 | |
dc.description.sourcetitle | IEEE Electron Device Letters | |
dc.description.volume | 24 | |
dc.description.issue | 5 | |
dc.description.page | 306-308 | |
dc.description.coden | EDLED | |
dc.identifier.isiut | 000184064600007 | |
Appears in Collections: | Staff Publications |
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