Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1492024
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dc.titleEnergy gap and band alignment for (HfO2)x(Al 2O3)1-x on (100) Si
dc.contributor.authorYu, H.Y.
dc.contributor.authorLi, M.F.
dc.contributor.authorCho, B.J.
dc.contributor.authorYeo, C.C.
dc.contributor.authorJoo, M.S.
dc.contributor.authorKwong, D.-L.
dc.contributor.authorPan, J.S.
dc.contributor.authorAng, C.H.
dc.contributor.authorZheng, J.Z.
dc.contributor.authorRamanathan, S.
dc.date.accessioned2014-10-07T04:27:28Z
dc.date.available2014-10-07T04:27:28Z
dc.date.issued2002-07-08
dc.identifier.citationYu, H.Y., Li, M.F., Cho, B.J., Yeo, C.C., Joo, M.S., Kwong, D.-L., Pan, J.S., Ang, C.H., Zheng, J.Z., Ramanathan, S. (2002-07-08). Energy gap and band alignment for (HfO2)x(Al 2O3)1-x on (100) Si. Applied Physics Letters 81 (2) : 376-378. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1492024
dc.identifier.issn00036951
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/82277
dc.description.abstractHigh-resolution x-ray photoelectron spectroscopy (XPS) was applied to characterize the electronic structures for a series of high-k materials (HfO2)x(Al2O3)1-x grown on (100) Si substrate with different HfO2 mole fraction x. Al 2p, Hf 4f, O 1s core levels spectra, valence band spectra, and O 1s energy loss all show continuous changes with x in (HfO2)x(Al 2O3)1-x. These data are used to estimate the energy gap (Eg) for (HfO2)x(Al 2O3)1-x, the valence band offset (ΔE ν) and the conduction band offset (ΔEc) between (HfO2)x(Al2O3)1-x and the (100) Si substrate. Our XPS results demonstrate that the values of E g, ΔEν, and ΔEc for (HfO 2)x(Al2O3)1-x change linearly with x. © 2002 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.1492024
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1063/1.1492024
dc.description.sourcetitleApplied Physics Letters
dc.description.volume81
dc.description.issue2
dc.description.page376-378
dc.description.codenAPPLA
dc.identifier.isiut000176487400064
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