Please use this identifier to cite or link to this item: https://doi.org/10.1109/TCST.2008.2000981
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dc.titleAdaptive control of electrostatic microactuators with bidirectional drive
dc.contributor.authorTee, K.P.
dc.contributor.authorGe, S.S.
dc.contributor.authorTay, F.E.H.
dc.date.accessioned2014-10-07T04:23:25Z
dc.date.available2014-10-07T04:23:25Z
dc.date.issued2009
dc.identifier.citationTee, K.P., Ge, S.S., Tay, F.E.H. (2009). Adaptive control of electrostatic microactuators with bidirectional drive. IEEE Transactions on Control Systems Technology 17 (2) : 340-352. ScholarBank@NUS Repository. https://doi.org/10.1109/TCST.2008.2000981
dc.identifier.issn10636536
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/81934
dc.description.abstractIn this paper, adaptive control is presented for a class of single-degree-of-freedom (1DOF) electrostatic microactuator systems which can be actively driven bidirectionally. The control objective is to track a reference trajectory within the air gap without knowledge of the plant parameters. Both full-state feedback and output feedback schemes are developed, the latter being motivated by practical difficulties in measuring velocity of the moving plate. For the full-state feedback scheme, the system is transformed to the parametric strict feedback form, for which adaptive backstepping is performed to achieve asymptotic output tracking. Analogously, the output feedback design involved transformation to the parametric output feedback form, followed by the use of adaptive observer backstepping to achieve asymptotic output tracking. To prevent contact between the movable and fixed electrodes, special barrier functions are employed in Lyapunov synthesis. All closed-loop signals are ensured to be bounded. Extensive simulation studies illustrate the performance of the proposed control. © 2008 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/TCST.2008.2000981
dc.sourceScopus
dc.subjectAdaptive control
dc.subjectElectrostatic devices
dc.subjectMicroactuators
dc.subjectNonlinear systems
dc.subjectObservers
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1109/TCST.2008.2000981
dc.description.sourcetitleIEEE Transactions on Control Systems Technology
dc.description.volume17
dc.description.issue2
dc.description.page340-352
dc.description.codenIETTE
dc.identifier.isiut000263832000007
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