Optimised layout generator for microgyroscope

Abstract

This paper presents an optimised out-of-plane microgyroscope layout generator using AutoCAD R14 and MS Excel™ as a first attempt to automating the design of resonant micro-inertial sensors. The out-of-plane microgyroscope with two degrees of freedom lumped parameter model was chosen as the synthesis topology. Analytical model for the open loop operation has been derived for the gyroscope performance characteristics. Functional performance parameters such as sensitivity are ensured to be satisfied while simultaneously optimising a design objective such as minimum area. A single algorithm will optimise the microgyroscope dimensions, while simultaneously maximizing or minimizing the objective functions: maximum sensitivity and minimum area. The multi-criteria objective function and optimisation methodology was implemented using the Generalised Reduced Gradient (GRG) algorithm. For data conversion a DXF to GDS converter was used. The optimised theoretical design performance parameters show good agreement with finite element analysis (FEA).