Optical coherent tomography (OCT) bio-imaging using 3D scanning micromirror

Abstract

Design and development of a 3D scanning MEMS micromirror integrated miniaturized optical probe has been presented in this article. The probe is designed to be less than 2 mm in diameter and has dynamic scanning modality for larger field of view. Scanning is achieved using 3D micromirror device, which has 16° out of plane and 360° beam rotation capability. Initial target of 45° out of plane deflection is yet to be achieved. The probe being developed currently would have scanning capability in one quarter of 360° full rotation. The field of view would still be very large and multiple optical biopsies would be possible for planned cancer model diagnostics. The feasibility of using scanning mirror into an optical probe was demonstrated using scanning repeatability and OCT imaging tests. Geometrical optics and package design using silicon optical bench have been established. Miniaturized 3D scanning micromirror have been designed and developed with 16° out of plane deflection demonstrated. Probe package integration and optical testing are carried out.