Test structures for new MEMS sensors and devices

Abstract

In this paper, several testing methods such as Scanning Electron Microscope (SEM) measurement, capacitance-voltage testing, optical testing and electrical testing are proposed to characterize three different design microgyroscopes, which is based on their spring designs. They are fixed-fixed spring microgyroscope, folded spring microgyroscope, and fishhook spring microgyroscope. The proposed testing methods were proven reliable for characterizing the microgyroscope.