Please use this identifier to cite or link to this item:
https://doi.org/10.1109/OMEMS.2008.4607847
DC Field | Value | |
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dc.title | A micromachined vibratory sub-wavelength diffraction grating laser scanner | |
dc.contributor.author | Du, Y. | |
dc.contributor.author | Zhou, G. | |
dc.contributor.author | Cheo, K.K.L. | |
dc.contributor.author | Zhang, Q. | |
dc.contributor.author | Feng, H. | |
dc.contributor.author | Chau, F.S. | |
dc.date.accessioned | 2014-06-19T05:30:31Z | |
dc.date.available | 2014-06-19T05:30:31Z | |
dc.date.issued | 2008 | |
dc.identifier.citation | Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2008). A micromachined vibratory sub-wavelength diffraction grating laser scanner. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS : 98-99. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2008.4607847 | |
dc.identifier.isbn | 9781424419180 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/73043 | |
dc.description.abstract | A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7° and scanning frequency of 20.35 kHz are experimentally achieved © 2008 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/OMEMS.2008.4607847 | |
dc.source | Scopus | |
dc.subject | Diffraction grating | |
dc.subject | Micro-opto-electromechanical systems (MOEMS) | |
dc.subject | Micro-scanners | |
dc.type | Conference Paper | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1109/OMEMS.2008.4607847 | |
dc.description.sourcetitle | 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS | |
dc.description.page | 98-99 | |
dc.identifier.isiut | 000264556700050 | |
Appears in Collections: | Staff Publications |
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