Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2008.4607847
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dc.titleA micromachined vibratory sub-wavelength diffraction grating laser scanner
dc.contributor.authorDu, Y.
dc.contributor.authorZhou, G.
dc.contributor.authorCheo, K.K.L.
dc.contributor.authorZhang, Q.
dc.contributor.authorFeng, H.
dc.contributor.authorChau, F.S.
dc.date.accessioned2014-06-19T05:30:31Z
dc.date.available2014-06-19T05:30:31Z
dc.date.issued2008
dc.identifier.citationDu, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2008). A micromachined vibratory sub-wavelength diffraction grating laser scanner. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS : 98-99. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2008.4607847
dc.identifier.isbn9781424419180
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/73043
dc.description.abstractA novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7° and scanning frequency of 20.35 kHz are experimentally achieved © 2008 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/OMEMS.2008.4607847
dc.sourceScopus
dc.subjectDiffraction grating
dc.subjectMicro-opto-electromechanical systems (MOEMS)
dc.subjectMicro-scanners
dc.typeConference Paper
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1109/OMEMS.2008.4607847
dc.description.sourcetitle2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
dc.description.page98-99
dc.identifier.isiut000264556700050
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