Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/72725
DC FieldValue
dc.titleLaser surface cleaning of electronic materials
dc.contributor.authorLu, Y.F.
dc.contributor.authorSong, W.D.
dc.contributor.authorZhang, Y.
dc.contributor.authorZheng, Y.W.
dc.date.accessioned2014-06-19T05:11:17Z
dc.date.available2014-06-19T05:11:17Z
dc.date.issued1999
dc.identifier.citationLu, Y.F.,Song, W.D.,Zhang, Y.,Zheng, Y.W. (1999). Laser surface cleaning of electronic materials. Proceedings of SPIE - The International Society for Optical Engineering 3618 : 278-289. ScholarBank@NUS Repository.
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/72725
dc.description.abstractLaser cleaning was demonstrated both theoretically and experimentally to be an effective cleaning technique for removing particulate and thin film contaminants from electronic materials. Two types of laser cleaning techniques have been discussed, relying on pulsed laser of the surface without or with the presence of a thin liquid coating. For dry and steam laser cleaning, cleaning models were established for removal of particles from substrate surfaces without or with a thin liquid layer by taking adhesion forces and cleaning force into account. The models not only explain the influence of laser fluence on cleaning efficiency, but also predict the cleaning thresholds. The laser-induced removal of organic thin film contaminants is considered due to laser ablation of the contaminants. Applications of laser cleaning to clean magnetic sliders, magnetic media surfaces, IC mold and PCB (Printed Circuit Board) will also be addressed.
dc.sourceScopus
dc.typeConference Paper
dc.contributor.departmentELECTRICAL ENGINEERING
dc.contributor.departmentDATA STORAGE INSTITUTE
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume3618
dc.description.page278-289
dc.description.codenPSISD
dc.identifier.isiutNOT_IN_WOS
Appears in Collections:Staff Publications

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