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Please use this identifier to cite or link to this item: https://doi.org/10.1109/OECC.2012.6276561
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dc.titleMEMS-based devices
dc.contributor.authorLee, C.
dc.date.accessioned2014-06-19T03:17:43Z
dc.date.available2014-06-19T03:17:43Z
dc.date.issued2012
dc.identifier.citationLee, C. (2012). MEMS-based devices. Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012 : 539-540. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OECC.2012.6276561" target="_blank">https://doi.org/10.1109/OECC.2012.6276561</a>
dc.identifier.isbn9781467309776
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/70913
dc.description.abstractNovel actuation mechanisms for optical MEMS devices have been developed for scanning mirrors and variable optical attenuation (VOA) applications. Recent progress in optical MEMS is highlighted as well. © 2012 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/OECC.2012.6276561
dc.sourceScopus
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/OECC.2012.6276561
dc.description.sourcetitleTechnical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012
dc.description.page539-540
dc.identifier.isiutNOT_IN_WOS
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