Measurement and wavelet denoising parameter extraction for MMIC on-chip square spiral inductors

Abstract

Accurate measurement and parameter extraction for square spiral inductor are important to MMIC design. The square spiral inductors with G-S-G open circuit structure have been designed, fabricated, and measured. In order to extract reasonable and smooth parameters from measured data, wavelet combined with data fitting technique is applied to denoise the measured data. More reasonable s-parameters and circuit parameters can be extracted from the denoised data that are useful for MMIC design.