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Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0169-4332(02)00425-7
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dc.titleEffect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition
dc.contributor.authorZeng, J.N.
dc.contributor.authorLow, J.K.
dc.contributor.authorRen, Z.M.
dc.contributor.authorLiew, T.
dc.contributor.authorLu, Y.F.
dc.date.accessioned2014-06-19T03:07:52Z
dc.date.available2014-06-19T03:07:52Z
dc.date.issued2002
dc.identifier.citationZeng, J.N., Low, J.K., Ren, Z.M., Liew, T., Lu, Y.F. (2002). Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition. Applied Surface Science 197-198 : 362-367. ScholarBank@NUS Repository. https://doi.org/10.1016/S0169-4332(02)00425-7
dc.identifier.issn01694332
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/70069
dc.description.abstractWe report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy. © 2002 Elsevier Science B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/S0169-4332(02)00425-7
dc.sourceScopus
dc.subjectPulsed laser deposition
dc.subjectRaman spectroscopy
dc.subjectSheet resistivity
dc.subjectTransmittance spectra
dc.subjectX-ray diffraction
dc.subjectZinc oxide
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/S0169-4332(02)00425-7
dc.description.sourcetitleApplied Surface Science
dc.description.volume197-198
dc.description.page362-367
dc.description.codenASUSE
dc.identifier.isiut000179261100063
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