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Please use this identifier to cite or link to this item: https://doi.org/10.1109/ICMA.2012.6285119
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dc.titleDevelopment for precise positioning of air bearing stages
dc.contributor.authorTan, K.K.
dc.contributor.authorHuang, S.
dc.contributor.authorLiang, W.
dc.contributor.authorYu, S.
dc.date.accessioned2014-06-19T03:05:59Z
dc.date.available2014-06-19T03:05:59Z
dc.date.issued2012
dc.identifier.citationTan, K.K.,Huang, S.,Liang, W.,Yu, S. (2012). Development for precise positioning of air bearing stages. 2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012 : 1943-1948. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/ICMA.2012.6285119" target="_blank">https://doi.org/10.1109/ICMA.2012.6285119</a>
dc.identifier.isbn9781467312776
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/69904
dc.description.abstractIn this paper, we propose control approaches for air bearing stages. First, we consider the case in which air bearing system is a linear stage. A control scheme incoporated with eddy current braking is proposed, where two control inputs are introduced to handle the nonlinear air bearing system. Secondly, we consider the case in which air bearing system is a spherical stage. The control scheme involves Kalman filter and optimal control designs. Finally, experimental results are given to further verify the effectiveness of the proposed methods. © 2012 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/ICMA.2012.6285119
dc.sourceScopus
dc.subjectAir bearing system
dc.subjectcontrol
dc.subjecteddy current
dc.subjectmagnetic field
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/ICMA.2012.6285119
dc.description.sourcetitle2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012
dc.description.page1943-1948
dc.identifier.isiutNOT_IN_WOS
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