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Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2011.03.020
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dc.titleConfiguration analysis of sensing element for photonic crystal based NEMS cantilever using dual nano-ring resonator
dc.contributor.authorLi, B.
dc.contributor.authorHsiao, F.-L.
dc.contributor.authorLee, C.
dc.date.accessioned2014-06-19T03:03:36Z
dc.date.available2014-06-19T03:03:36Z
dc.date.issued2011-10
dc.identifier.citationLi, B., Hsiao, F.-L., Lee, C. (2011-10). Configuration analysis of sensing element for photonic crystal based NEMS cantilever using dual nano-ring resonator. Sensors and Actuators, A: Physical 169 (2) : 352-361. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2011.03.020
dc.identifier.issn09244247
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/69694
dc.description.abstractPhotonic crystal (PhC) based channel drop filters including two hexagonal rings in a two dimensional (2-D) photonic crystal silicon slab of hexagonal lattice are integrated on microcantilevers for nanoelectromechanical systems (NEMS) sensor applications. The proposed two hexagonal rings are named as dual nano-ring (DNR) resonator. The sensing characteristics of dual nano-ring (DNR) resonator at various positions adjacent to the junction of the microcantilever and the substrate are investigated. The derived quality factors is over 3000, and the minimum detectable force can be as small as 7.58 nN. Moreover, the continuous wave field distribution modeling is deployed to explain the origins of resonant mechanisms occurred in deformed DNR resonator under various applied forces. © 2011 Elsevier B.V. © 2010 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.sna.2011.03.020
dc.sourceScopus
dc.subjectMicrocantilever
dc.subjectNano-ring
dc.subjectNanomechanical sensor
dc.subjectNEMS
dc.subjectPhotonic crystal resonator
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.sna.2011.03.020
dc.description.sourcetitleSensors and Actuators, A: Physical
dc.description.volume169
dc.description.issue2
dc.description.page352-361
dc.description.codenSAAPE
dc.identifier.isiut000294941700015
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