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Title: Computational study of an optical NEMS sensor
Authors: Lee, C. 
Xiang, W. 
Hsiao, F.-L. 
Keywords: Microcantilever
Issue Date: 2009
Citation: Lee, C.,Xiang, W.,Hsiao, F.-L. (2009). Computational study of an optical NEMS sensor. 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 : 299-302. ScholarBank@NUS Repository.
Abstract: Optical nanoelectromechanical systems (NEMS) based cantilever sensor embedded with a nanocavity resonator is investigated in this study. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The sensor characteristics of NEMS-cantilevers with various lengths and the same nanocavity structure are studied in air and water. © 2009 IEEE NANO Organizers.
Source Title: 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009
ISBN: 9789810836948
Appears in Collections:Staff Publications

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