Please use this identifier to cite or link to this item: https://doi.org/10.1088/0960-1317/18/2/025001
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dc.titleA two axes scanning SOI MEMS micromirror for endoscopic bioimaging
dc.contributor.authorSingh, J.
dc.contributor.authorTeo, J.H.S.
dc.contributor.authorXu, Y.
dc.contributor.authorPremachandran, C.S.
dc.contributor.authorChen, N.
dc.contributor.authorKotlanka, R.
dc.contributor.authorOlivo, M.
dc.contributor.authorSheppard, C.J.R.
dc.date.accessioned2014-06-17T09:42:05Z
dc.date.available2014-06-17T09:42:05Z
dc.date.issued2008-02-01
dc.identifier.citationSingh, J., Teo, J.H.S., Xu, Y., Premachandran, C.S., Chen, N., Kotlanka, R., Olivo, M., Sheppard, C.J.R. (2008-02-01). A two axes scanning SOI MEMS micromirror for endoscopic bioimaging. Journal of Micromechanics and Microengineering 18 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/18/2/025001
dc.identifier.issn09601317
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/66907
dc.description.abstractA novel silicon on insulator (SOI) MEMS process has been designed and developed to realize a two axes thermally actuated single crystal silicon micromirror device, which consists of a mirror plate, four flexural springs and four thermal actuators. The mirror plate has the same thickness as a SOI device layer i.e. 4 μm. The SOI layer is selectively thinned down to 2 μm for fabricating flexural springs and thermal actuators. The thinning of the SOI layer is essential to lower (control) the flexural rigidity of the springs and the actuators and thus to achieve a higher tilt angle at low thermal power. The developed single wafer process is based on dry reactive ion etching CMOS compatible chemistries. The minimum chip size design of 1 mm × 1 mm has a 400 μm diameter mirror plate. Other chip designs include the mirror diameters in the range from 200 to 500 μm. This paper also presents a study on the mirror plate curvature, thermal actuation mechanism and the experimental results. The measured maximum angular deflection achieved was 17°at an operating applied voltage of less than 2 V, and the radius of curvature of the mirror plate was in the range from 20 to 50 mm. The micromirror was developed for a miniature catheter optical probe for optical coherence tomography in vivo imaging. A low cross-sectional size of the probe and higher resolution are essential for investigating inaccessible pathologies in vivo. This required a compact micromirror chip and yet sufficiently large mirror plate (typically ∼500 μm or more), this trade-off was the key motivation for the research presented in this paper. © 2008 IOP Publishing Ltd.
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentBIOENGINEERING
dc.description.doi10.1088/0960-1317/18/2/025001
dc.description.sourcetitleJournal of Micromechanics and Microengineering
dc.description.volume18
dc.description.issue2
dc.description.page-
dc.description.codenJMMIE
dc.identifier.isiut000252966100001
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