Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2642619
DC FieldValue
dc.titleSurface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
dc.contributor.authorVicknesh, S.
dc.contributor.authorTripathy, S.
dc.contributor.authorLin, V.K.X.
dc.contributor.authorChua, S.J.
dc.contributor.authorKumar, B.
dc.contributor.authorGong, H.
dc.date.accessioned2014-06-17T08:00:14Z
dc.date.available2014-06-17T08:00:14Z
dc.date.issued2007
dc.identifier.citationVicknesh, S., Tripathy, S., Lin, V.K.X., Chua, S.J., Kumar, B., Gong, H. (2007). Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates. Applied Physics Letters 90 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2642619
dc.identifier.issn00036951
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/65021
dc.description.abstractIn this study, the authors report on the fabrication processes to realize the freestanding ZnO micromechanical structures on Si(111) substrates. Arrays of freestanding cantilevers and microbridges have been fabricated using a combination of dry etching techniques. The mechanical properties of the released ZnO structures are characterized by micro-Raman spectroscopy. The residual stress in these freestanding micromechanical structures is determined from the E2 (2) phonon peak shift. Such a method to realize the freestanding structures on Si platform would be useful for the fabrication of ZnO-based microelectromechanical systems and sensors. © 2007 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.2642619
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentMATERIALS SCIENCE AND ENGINEERING
dc.description.doi10.1063/1.2642619
dc.description.sourcetitleApplied Physics Letters
dc.description.volume90
dc.description.issue9
dc.description.page-
dc.description.codenAPPLA
dc.identifier.isiut000244591700033
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