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Please use this identifier to cite or link to this item: https://doi.org/10.1016/0038-1101(92)90168-C
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dc.titleContact resistivity measurement using four circular contacts
dc.contributor.authorChua, S.J.
dc.contributor.authorLee, S.H.
dc.date.accessioned2014-06-17T06:45:58Z
dc.date.available2014-06-17T06:45:58Z
dc.date.issued1992
dc.identifier.citationChua, S.J., Lee, S.H. (1992). Contact resistivity measurement using four circular contacts. Solid-State Electronics 35 (9) : 1331-1335. ScholarBank@NUS Repository. https://doi.org/10.1016/0038-1101(92)90168-C
dc.identifier.issn00381101
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/61967
dc.description.abstractIn this paper, a simple technique for measuring contact resistivity of metallization is proposed. It makes use of four circular contacts, a structure which is simple to fabricate and requires only two measurement steps to obtain the contact resistivity. This technique is suitable for process monitoring of contact resistivity in large-scale production where simplicity in fabricating the test structure and in measurement is a necessity.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/0038-1101(92)90168-C
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL ENGINEERING
dc.description.doi10.1016/0038-1101(92)90168-C
dc.description.sourcetitleSolid-State Electronics
dc.description.volume35
dc.description.issue9
dc.description.page1331-1335
dc.description.codenSSELA
dc.identifier.isiutA1992JG95000020
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