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Title: Micromechanical torsional digital-to-analog converter for open-loop angular positioning applications
Authors: Zhou, G. 
Tay, F.E.H. 
Chau, F.S. 
Zhao, Y.
Logeeswaran, V.J. 
Issue Date: May-2004
Citation: Zhou, G., Tay, F.E.H., Chau, F.S., Zhao, Y., Logeeswaran, V.J. (2004-05). Micromechanical torsional digital-to-analog converter for open-loop angular positioning applications. Journal of Micromechanics and Microengineering 14 (5) : 737-745. ScholarBank@NUS Repository.
Abstract: This paper reports a novel micromechanical torsional digital-to-analog converter (MTDAC), operated in open-loop with digitally controlled precise multi-level tilt angles. The MTDAC mechanism presented is analogous to that of an electrical binary-weighted-input digital-to-analog converter (DAC). It consists of a rigid tunable platform, an array of torsional microactuators, each operating in a two-state (on/off) mode, and a set of connection beams with binary-weighted torsional stiffnesses that connect the actuators to the platform. The feasibility of the proposed MTDAC mechanism was verified numerically by finite element simulations and experimentally with a commercial optical phase-shifting interferometric system. A prototype 2-bit MTDAC was implemented using the poly-MUMPS process achieving a full-scale output tilt angle of 1.92° with a rotation step of 0.64°. This mechanism can be configured for many promising applications, particularly in beam steering-based OXC switches.
Source Title: Journal of Micromechanics and Microengineering
ISSN: 09601317
DOI: 10.1088/0960-1317/14/5/012
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