Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2009.02.011
DC FieldValue
dc.titleHigh speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication
dc.contributor.authorDu, Y.
dc.contributor.authorZhou, G.
dc.contributor.authorCheo, K.K.L.
dc.contributor.authorZhang, Q.
dc.contributor.authorFeng, H.
dc.contributor.authorYang, B.
dc.contributor.authorChau, F.S.
dc.date.accessioned2014-06-17T06:23:19Z
dc.date.available2014-06-17T06:23:19Z
dc.date.issued2009-11
dc.identifier.citationDu, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Yang, B., Chau, F.S. (2009-11). High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication. Sensors and Actuators, A: Physical 156 (1) : 134-144. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2009.02.011
dc.identifier.issn09244247
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/60446
dc.description.abstractIn this paper, we report a design, modeling and fabrication of a microelectromechanical system (MEMS) based in-plane vibratory sub-wavelength diffraction grating scanner for high optical efficiency, high speed laser scanning applications. This paper demonstrates that with careful design, optical efficiency of more than 75% is experimentally achievable with a simple gold-coated binary sub-wavelength grating. High frequency scanning of 55.01 kHz with an optical scan angle of 5.2° is achievable even when operated in air. The device demonstrated has a 1 mm diameter grating. Through consideration of the mass of the suspension springs, stress alleviation beams and fabrication imperfections, a theoretical model is proposed which can estimate the dynamic performance close to the actual operating condition. © 2009 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.sna.2009.02.011
dc.sourceScopus
dc.subjectDiffraction grating
dc.subjectMicro-opto-electromechanical systems (MOEMS)
dc.subjectMicro-scanners
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1016/j.sna.2009.02.011
dc.description.sourcetitleSensors and Actuators, A: Physical
dc.description.volume156
dc.description.issue1
dc.description.page134-144
dc.description.codenSAAPE
dc.identifier.isiut000272636100021
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

12
checked on Mar 1, 2021

WEB OF SCIENCETM
Citations

11
checked on Mar 1, 2021

Page view(s)

73
checked on Mar 1, 2021

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.