Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.sna.2009.02.011
DC Field | Value | |
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dc.title | High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication | |
dc.contributor.author | Du, Y. | |
dc.contributor.author | Zhou, G. | |
dc.contributor.author | Cheo, K.K.L. | |
dc.contributor.author | Zhang, Q. | |
dc.contributor.author | Feng, H. | |
dc.contributor.author | Yang, B. | |
dc.contributor.author | Chau, F.S. | |
dc.date.accessioned | 2014-06-17T06:23:19Z | |
dc.date.available | 2014-06-17T06:23:19Z | |
dc.date.issued | 2009-11 | |
dc.identifier.citation | Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Yang, B., Chau, F.S. (2009-11). High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication. Sensors and Actuators, A: Physical 156 (1) : 134-144. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2009.02.011 | |
dc.identifier.issn | 09244247 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/60446 | |
dc.description.abstract | In this paper, we report a design, modeling and fabrication of a microelectromechanical system (MEMS) based in-plane vibratory sub-wavelength diffraction grating scanner for high optical efficiency, high speed laser scanning applications. This paper demonstrates that with careful design, optical efficiency of more than 75% is experimentally achievable with a simple gold-coated binary sub-wavelength grating. High frequency scanning of 55.01 kHz with an optical scan angle of 5.2° is achievable even when operated in air. The device demonstrated has a 1 mm diameter grating. Through consideration of the mass of the suspension springs, stress alleviation beams and fabrication imperfections, a theoretical model is proposed which can estimate the dynamic performance close to the actual operating condition. © 2009 Elsevier B.V. All rights reserved. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.sna.2009.02.011 | |
dc.source | Scopus | |
dc.subject | Diffraction grating | |
dc.subject | Micro-opto-electromechanical systems (MOEMS) | |
dc.subject | Micro-scanners | |
dc.type | Article | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1016/j.sna.2009.02.011 | |
dc.description.sourcetitle | Sensors and Actuators, A: Physical | |
dc.description.volume | 156 | |
dc.description.issue | 1 | |
dc.description.page | 134-144 | |
dc.description.coden | SAAPE | |
dc.identifier.isiut | 000272636100021 | |
Appears in Collections: | Staff Publications |
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