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Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2006.02.027
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dc.titleFast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control
dc.contributor.authorZhao, Y.
dc.contributor.authorTay, F.E.H.
dc.contributor.authorZhou, G.
dc.contributor.authorChau, F.S.
dc.date.accessioned2014-06-17T06:21:31Z
dc.date.available2014-06-17T06:21:31Z
dc.date.issued2006-11-20
dc.identifier.citationZhao, Y., Tay, F.E.H., Zhou, G., Chau, F.S. (2006-11-20). Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control. Sensors and Actuators, A: Physical 132 (2) : 421-428. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2006.02.027
dc.identifier.issn09244247
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/60294
dc.description.abstractFast and precise positioning is of great importance for electrostatically actuated dual-axis micromirror. However, this device suffers from long settling time and large cross-axis coupling. This paper reports a multi-loop digital control method to improve the positioning performance. The system is identified and a multi-loop proportional, integral and derivative (PID) controller is designed. Both the simulation and experimental results show a significant improvement for the positioning speed and precision. The settling time is shortened from 15 to 5 ms and 24 to 3 ms for x-axis and y-axis rotation, respectively. The cross-axis coupling is suppressed to a negligible level. Less than 5% maximum positioning error is obtained. © 2006 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.sna.2006.02.027
dc.sourceScopus
dc.subjectDual-axis micromirror
dc.subjectMEMS
dc.subjectMulti-loop control
dc.subjectPositioning
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1016/j.sna.2006.02.027
dc.description.sourcetitleSensors and Actuators, A: Physical
dc.description.volume132
dc.description.issue2
dc.description.page421-428
dc.description.codenSAAPE
dc.identifier.isiut000242513900001
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