Please use this identifier to cite or link to this item: https://doi.org/10.1088/1742-6596/34/1/177
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dc.titleDesign and optimization of dual optical fiber MEMS pressure sensor for biomedical applications
dc.contributor.authorDagang, G.
dc.contributor.authorPo, S.N.C.
dc.contributor.authorHock, F.T.E.
dc.contributor.authorRongming, L.
dc.date.accessioned2014-06-17T06:16:29Z
dc.date.available2014-06-17T06:16:29Z
dc.date.issued2006-04-01
dc.identifier.citationDagang, G., Po, S.N.C., Hock, F.T.E., Rongming, L. (2006-04-01). Design and optimization of dual optical fiber MEMS pressure sensor for biomedical applications. Journal of Physics: Conference Series 34 (1) : 1073-1078. ScholarBank@NUS Repository. https://doi.org/10.1088/1742-6596/34/1/177
dc.identifier.issn17426588
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/59863
dc.description.abstractA novel Single Deeply Corrugated Diaphragm (SDCD) based dual optical fiber Fabry-Perot pressure sensor for blood pressure measurement is proposed. Both mechanical and optical simulations are performed to demonstrate the feasibility and superior performance of the proposed sensor. Result shows that less than 2% nonlinearity can be achieved for the proposed sensor using optimal Fabry-Perot microcavity. Also, the fabrication process of the proposed sensor is given, instead of complicated fusion bonding process, only bulk and surface micromachining techniques are required which facilitate the mass production of such biocompatible and disposable pressure sensors. © 2006 IOP Publishing Ltd.
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1088/1742-6596/34/1/177
dc.description.sourcetitleJournal of Physics: Conference Series
dc.description.volume34
dc.description.issue1
dc.description.page1073-1078
dc.identifier.isiut000286667100177
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