Bio-inspired polymeric patterns with enhanced wear durability for microsystem applications

Abstract

At micro/nano-scale, friction force dominates at the interface between bodies moving in relative motion and severely affects their smooth operation. This effect limits the performance of microsystem devices such as micro-electro-mechanical systems (MEMS). In addition, friction force also leads to material removal or wear and thereby reduces the durability i.e. the useful operating life of the devices. In this work, we fabricated bio-inspired polymeric patterns for tribological applications. Inspired by the surface features on lotus leaves namely, the protuberances and wax, SU-8 polymeric films spin-coated on silicon wafers were topographically and chemically modified. For topographical modification, micro-scale patterns were fabricated using nanoimprint lithography and for chemical modification, the micro-patterns were coated with perfluoropolyether nanolubricant. Tribological investigation of the bio-inspired patterns revealed that the friction coefficients reduced significantly and the wear durability increased by several orders. In order to enhance the wear durability much further, the micro-patterns were exposed to argon/oxygen plasma and were subsequently coated with the perfluoropolyether nanolubricant. Bio-inspired patterns with enhanced wear durability, such as the ones investigated in the current work, have potential tribological applications in MEMS/Bio-MEMS actuator-based devices. © 2011 Elsevier B.V. All rights reserved.