Please use this identifier to cite or link to this item: https://doi.org/10.1109/JSTQE.2009.2034271
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dc.titleA silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging
dc.contributor.authorZhang, Q.X.
dc.contributor.authorDu, Y.
dc.contributor.authorTan, C.W.
dc.contributor.authorZhang, J.
dc.contributor.authorYu, M.B.
dc.contributor.authorYeoh, W.G.
dc.contributor.authorLo, G.-Q.
dc.contributor.authorKwong, D.-L.
dc.date.accessioned2014-06-17T06:09:24Z
dc.date.available2014-06-17T06:09:24Z
dc.date.issued2010-01
dc.identifier.citationZhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Yeoh, W.G., Lo, G.-Q., Kwong, D.-L. (2010-01). A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging. IEEE Journal on Selected Topics in Quantum Electronics 16 (1) : 267-275. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2034271
dc.identifier.issn1077260X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/59262
dc.description.abstractA silicon (Si) platform, which consists of passive alignment structures (V-grooves), active microelectromechanical systems (MEMS) alignment components, mechanical locking mechanisms, and predeposited goldtin soldering pads is developed to address the submicron accuracy assembly requirement of the discrete laser diode (LD) to a small core in-chip Si waveguide (WG). A 2-D in situ active alignment of a ball lens in LD-ball lensSi-WG coupling system is presented here. The 1550-nm DFB LD and the passive Si-photonics chip are attached onto the platform, using flipchip bonding process. The 2-D alignment of the ball lens is then achieved through the in-plane motion of the suspension arms and the specially designed V-groove. The position of the ball lens is subsequently fixed by the locking mechanism mechanically. MEMS electrothermal V-beam actuators, which can provide large force with a large displacement under a low driving voltage, i.e., 50μm at 25 V are employed in this platform. The effectiveness and stability of the arm locking function have been tested with a shift of 0.1 μm larafter vibration testing (10g, 2 kHz). The integrated aligning and locking functions of the MEMS platform are also demonstrated through the LD-ball lensSi-WG coupling system. These results show the potential of this MEMS platform in hybrid integrated Si photonics and applications that consist of LD-ball lensSi-WG coupling system, e.g., the transmitter and transceiver. © 2006 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/JSTQE.2009.2034271
dc.sourceScopus
dc.subjectActive alignment
dc.subjectAssembly
dc.subjectElectrothermal actuation
dc.subjectMechanical locking
dc.subjectMicroactuators
dc.subjectSi photonics
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1109/JSTQE.2009.2034271
dc.description.sourcetitleIEEE Journal on Selected Topics in Quantum Electronics
dc.description.volume16
dc.description.issue1
dc.description.page267-275
dc.description.codenIJSQE
dc.identifier.isiut000274382900031
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