Self-heating cancellation circuits for microbolometer

Abstract

A new self-heating cancellation technique for microbolometer is proposed. The cancellation of the self-heating effect is achieved by using its replica generated based on the equivalence between electrical and thermal systems. The self-heating cancellation circuits are realized in both voltage- and current-mode and implemented on silicon using a 0.6μm CMOS technology. The test results have demonstrated the effectiveness of the self-heating cancellation and the tunable feature in both circuits. Although the technique is aimed for the self-heating cancellation in the microbolometes, it may be used in other applications, such as the piezoresistive pressure sensors, where the self-heating exists in a similar way. © 2003 Elsevier B.V. All rights reserved.