Please use this identifier to cite or link to this item:
https://doi.org/10.1109/LED.2012.2195152
DC Field | Value | |
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dc.title | PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection | |
dc.contributor.author | Guo, H. | |
dc.contributor.author | Lou, L. | |
dc.contributor.author | Chen, X. | |
dc.contributor.author | Lee, C. | |
dc.date.accessioned | 2014-06-17T03:01:08Z | |
dc.date.available | 2014-06-17T03:01:08Z | |
dc.date.issued | 2012 | |
dc.identifier.citation | Guo, H., Lou, L., Chen, X., Lee, C. (2012). PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection. IEEE Electron Device Letters 33 (7) : 1078-1080. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2012.2195152 | |
dc.identifier.issn | 07413106 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/57002 | |
dc.description.abstract | A polydimethylsiloxane (PDMS)-coated nanoelectromechanical systems diaphragm embedded with silicon nanowires (SiNWs) is proposed for chloroform vapor detection at room temperature. The PDMS film swells and leads to the deformation of micro-diaphragm when it is exposed to vapor. The SiNWs are connected in a Wheatstone bridge which is used to transform the deformation into a measurable output voltage. This sensor provides good linearity, sensitivity, and repeatability. The sensitivity of our sensor for chloroform vapor detection is 1.41 μV/V/ppm while the power consumption is as low as 2 μW. © 2012 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/LED.2012.2195152 | |
dc.source | Scopus | |
dc.subject | Chloroform vapor sensor | |
dc.subject | nanoelectromechanical systems (NEMS) diaphragm | |
dc.subject | piezoresistive silicon nanowires (SiNWs) | |
dc.subject | polydimethylsiloxane (PDMS) film | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/LED.2012.2195152 | |
dc.description.sourcetitle | IEEE Electron Device Letters | |
dc.description.volume | 33 | |
dc.description.issue | 7 | |
dc.description.page | 1078-1080 | |
dc.description.coden | EDLED | |
dc.identifier.isiut | 000305835300054 | |
Appears in Collections: | Staff Publications |
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