1. ScholarBank@NUS
  2. 1. Staff
  3. Staff Publications
Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.mee.2006.01.003
DC FieldValue
dc.titleNanoscale imaging with a portable field emission scanning electron microscope
dc.contributor.authorKhursheed, A.
dc.contributor.authorNelliyan, K.
dc.contributor.authorDing, Y.
dc.date.accessioned2014-06-17T02:58:21Z
dc.date.available2014-06-17T02:58:21Z
dc.date.issued2006-04
dc.identifier.citationKhursheed, A., Nelliyan, K., Ding, Y. (2006-04). Nanoscale imaging with a portable field emission scanning electron microscope. Microelectronic Engineering 83 (4-9 SPEC. ISS.) : 762-766. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2006.01.003
dc.identifier.issn01679317
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/56763
dc.description.abstractSecondary electron images at low landing energies (below 50 eV) are presented by a portable field emission scanning electron microscope. The results show that nanoscale images of resolution better than 20 nm can be obtained on a nylon-fibre specimen at landing energies as low as 1 eV. Preliminary simulation results predict that the image resolution should be much higher. © 2006 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.mee.2006.01.003
dc.sourceScopus
dc.subjectImmersion electron lens
dc.subjectLanding energy
dc.subjectSEM
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.mee.2006.01.003
dc.description.sourcetitleMicroelectronic Engineering
dc.description.volume83
dc.description.issue4-9 SPEC. ISS.
dc.description.page762-766
dc.description.codenMIENE
dc.identifier.isiut000237581900036
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.