Modelling and application of elastomer mesh for microwave probing

Abstract

A novel microwave probing application using elastomer mesh is described. It is targeted for testing wafer level packages with very fine pitch of the order of 100 micron and large pin counts of the order of a thousand. The metallised elastomer mesh provides mechanical compliance as well as good electrical contact. A mesh-coplanar probe is modelled by the partial element equivalent circuit (PEEC) method. The model is verified through frequency domain measurements on a prototype test fixture.