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Please use this identifier to cite or link to this item: https://doi.org/10.1049/el:20072424
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dc.titleMicromechanical resonator with ultra-high quality factor
dc.contributor.authorPalaniapan, M.
dc.contributor.authorKhine, L.
dc.date.accessioned2014-06-17T02:56:40Z
dc.date.available2014-06-17T02:56:40Z
dc.date.issued2007
dc.identifier.citationPalaniapan, M., Khine, L. (2007). Micromechanical resonator with ultra-high quality factor. Electronics Letters 43 (20) : 1090-1092. ScholarBank@NUS Repository. https://doi.org/10.1049/el:20072424
dc.identifier.issn00135194
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/56621
dc.description.abstractA 6.3MHz Lamé-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor (Q) values over 1 million in ambient pressures as high as 200Pa is reported. A maximum Q value of 1.6 million was experimentally measured for the resonator designed for this study. It was also experimentally observed that the Q value for the designed bulk mode resonator was relatively independent for pressures below 200Pa, suggesting that the Q is pressure limited for pressure higher than 200Pa. © The Institution of Engineering and Technology 2007.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1049/el:20072424
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1049/el:20072424
dc.description.sourcetitleElectronics Letters
dc.description.volume43
dc.description.issue20
dc.description.page1090-1092
dc.description.codenELLEA
dc.identifier.isiut000250862400021
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