Backpropagation approximation approach based generation of macromodels for static and dynamic simulations

Abstract

In this paper, a novel backpropagation approximation approach based macromodeling technique for a lateral folded-beam comb-drive micro-resonator is proposed. For static simulations, the results show that the macromodel speeds up simulations by a maximum factor of 291 over the finite element approach with less than 1.4% error for small displacements of up to 2 μm. The simulation results also show good agreement with the experimental results. For dynamic simulations, it speeds up simulations by a factor of 456 over the finite element approach with less than 2% error for an applied Vac of up to 125 V. The findings also show that the dynamic transient analysis of our device is valid for an applied Vdc of up to 125 V. Similarly, the dynamic simulation results also show quality agreement with the experimental results.