Please use this identifier to cite or link to this item: https://doi.org/10.1088/0960-1317/15/5/009
DC FieldValue
dc.titleAn electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives
dc.contributor.authorYang, J.P.
dc.contributor.authorDeng, X.C.
dc.contributor.authorChong, T.C.
dc.date.accessioned2014-06-17T02:38:05Z
dc.date.available2014-06-17T02:38:05Z
dc.date.issued2005-05
dc.identifier.citationYang, J.P., Deng, X.C., Chong, T.C. (2005-05). An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives. Journal of Micromechanics and Microengineering 15 (5) : 958-965. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/15/5/009
dc.identifier.issn09601317
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/55008
dc.description.abstractElectro-thermal actuations are very attractive since they can generate large deflections and forces with low actuating voltages and their fabrication process is compatible with the general integrated circuit (IC) fabrication process. In this paper, we present a novel electro-thermal bimorph-based microactuator as a precise-tracking positioner for high-density optical disk drives (ODD). In the proposed microactuator, four thermal bimorph cantilevers suspend a mirror plate by linkage hinges at the free ends of the cantilever, whose opposing ends are rigidly attached to the substrate. Each bimorph cantilever comprises two material layers with different thermal expansions. Due to the bimorph effect, the mirror can be displaced upwards in the out-of-plane parallel to the substrate by passing electric current through the cantilevers. Thermal-mechanical analysis, transient responses and mechanical vibrations are investigated by analytical modeling and finite element simulation. The overall device, with an area of 700 μm × 700 μm, is fabricated successfully by MEMS technology compatible with the standard IC process. The experimental and simulation results show that the mirror can be vertically moved up 1 μm, which is equivalent to 1.4 μm displacement in the track direction of the spinning optical disk, by a lower driving voltage at 3 V with 3 mW power consumption. Its mechanical frequency of 7 kHz is high enough to support high bandwidth servo control in high-density ODD. © 2005 IOP Publishing Ltd.
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1088/0960-1317/15/5/009
dc.description.sourcetitleJournal of Micromechanics and Microengineering
dc.description.volume15
dc.description.issue5
dc.description.page958-965
dc.description.codenJMMIE
dc.identifier.isiut000229565100009
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

44
checked on Sep 24, 2021

WEB OF SCIENCETM
Citations

39
checked on Sep 15, 2021

Page view(s)

125
checked on Sep 24, 2021

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.